RASE4, Ion Implantation in Solids, Range, Straggling, Energy Deposition, Recoils

DAMG2, Ion Implantation in Solids, Energy Deposition Distribution with Recoils

NAME OR DESIGNATION OF PROGRAM, COMPUTER, DESCRIPTION OF PROBLEM OR FUNCTION, METHOD OF SOLUTION, RESTRICTIONS ON THE COMPLEXITY OF THE PROBLEM, TYPICAL RUNNING TIME, FEATURES, AUXILIARIES, STATUS, REFERENCES, MACHINE REQUIREMENTS, LANGUAGE, OPERATING SYSTEM UNDER WHICH PROGRAM IS EXECUTED, OTHER PROGRAMMING OR OPERATING INFORMATION OR RESTRICTIONS, NAME AND ESTABLISHMENT OF AUTHOR, MATERIAL, CATEGORIES

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Program name | Package id | Status | Status date |
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COREL | NESC0758/01 | Tested | 01-OCT-1979 |

DAMG2 | NESC0758/02 | Tested | 01-OCT-1979 |

RASE4 | NESC0758/03 | Tested | 01-OCT-1979 |

Machines used:

Package ID | Orig. computer | Test computer |
---|---|---|

NESC0758/01 | IBM 370 series | IBM 370 series |

NESC0758/02 | IBM 370 series | IBM 370 series |

NESC0758/03 | IBM 370 series | IBM 370 series |

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3. DESCRIPTION OF PROBLEM OR FUNCTION

COREL calculates the final average projected range, standard deviation in projected range, standard deviation in locations transverse to projected range, and average range along path for energetic atomic projectiles incident on amorphous targets or crystalline targets oriented such that the projectiles are not incident along low index crystallographic axes or planes.

RASE4 calculates the instantaneous average projected range, standard deviation in projected range, standard deviation in locations transverse to projected range, and average range along path for energetic atomic projectiles incident on amorphous targets or crystalline targets oriented such that the projectiles are not incident along low index crystallographic axes or planes. RASE4 also calculates the instantaneous rate at which the projectile is depositing energy into atomic processes (damage) and into electronic processes (electronic excitation), the average range of target atom recoils projected onto the direction of motion of the projectiles, and the standard deviation in the recoil projected range.

DAMG2 calculates the distribution in depth of the energy deposited into atomic processes (damage), electronic processes (electronic excitation), or other energy-dependent quality produced by energetic atomic projectiles incident on amorphous targets or crystalline targets oriented such that the projectiles are not incident along low index crystallographic axes or planes.

COREL calculates the final average projected range, standard deviation in projected range, standard deviation in locations transverse to projected range, and average range along path for energetic atomic projectiles incident on amorphous targets or crystalline targets oriented such that the projectiles are not incident along low index crystallographic axes or planes.

RASE4 calculates the instantaneous average projected range, standard deviation in projected range, standard deviation in locations transverse to projected range, and average range along path for energetic atomic projectiles incident on amorphous targets or crystalline targets oriented such that the projectiles are not incident along low index crystallographic axes or planes. RASE4 also calculates the instantaneous rate at which the projectile is depositing energy into atomic processes (damage) and into electronic processes (electronic excitation), the average range of target atom recoils projected onto the direction of motion of the projectiles, and the standard deviation in the recoil projected range.

DAMG2 calculates the distribution in depth of the energy deposited into atomic processes (damage), electronic processes (electronic excitation), or other energy-dependent quality produced by energetic atomic projectiles incident on amorphous targets or crystalline targets oriented such that the projectiles are not incident along low index crystallographic axes or planes.

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4. METHOD OF SOLUTION

COREL: The truncated differential equation which governs the several variables being sought is solved through second-order by trapezoidal integration. The energy-dependent coefficients in the equation are obtained by rectangular integration over the Thomas-Fermi elastic scattering cross section.

RASE4: The truncated differential equation which governs the range and straggling variables is solved through second-order by trapezoidal integration. The energy-dependent coefficients in the equation, the energy deposition rates, and the recoil range and straggling variables are obtained by rectangular integration over the Thomas-Fermi elastic scattering cross section.

DAMG2: The integral which governs the depth distribution of interest is evaluated by rectangular integration. Energy redistribution by the recoiling target atoms is included in a Gaussian approximation.

COREL: The truncated differential equation which governs the several variables being sought is solved through second-order by trapezoidal integration. The energy-dependent coefficients in the equation are obtained by rectangular integration over the Thomas-Fermi elastic scattering cross section.

RASE4: The truncated differential equation which governs the range and straggling variables is solved through second-order by trapezoidal integration. The energy-dependent coefficients in the equation, the energy deposition rates, and the recoil range and straggling variables are obtained by rectangular integration over the Thomas-Fermi elastic scattering cross section.

DAMG2: The integral which governs the depth distribution of interest is evaluated by rectangular integration. Energy redistribution by the recoiling target atoms is included in a Gaussian approximation.

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5. RESTRICTIONS ON THE COMPLEXITY OF THE PROBLEM

COREL and RASE4: Compound targets with up to four different atomic constituents may be considered. The maximum incident energy which may be used is 800 times the Lindhard characteristic energy, a quantity which depends on the mass and atomic number of the incident projectile and the target atoms. aximum incident energy can be increased by increasing storage area available for the program, and increasing the dimensions of the energy-dependent arrays.

COREL and RASE4: Compound targets with up to four different atomic constituents may be considered. The maximum incident energy which may be used is 800 times the Lindhard characteristic energy, a quantity which depends on the mass and atomic number of the incident projectile and the target atoms. aximum incident energy can be increased by increasing storage area available for the program, and increasing the dimensions of the energy-dependent arrays.

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6. TYPICAL RUNNING TIME

For a given incident energy the programs run longer for lighter projectiles. Average running time for COREL is 30 seconds for 200 equally-spaced incident energies. Average running time for RASE4 for 10 equally-spaced incident energies and 10 equally-spaced instantaneous energies is 180 seconds. Average running time for DAMG2 for 10 equally-spaced incident energies is 120 seconds. The NESC executed the sample problems for COREL, RASE4, and DAMG2 in 2, 6, and 4 CPU seconds respectively.

For a given incident energy the programs run longer for lighter projectiles. Average running time for COREL is 30 seconds for 200 equally-spaced incident energies. Average running time for RASE4 for 10 equally-spaced incident energies and 10 equally-spaced instantaneous energies is 180 seconds. Average running time for DAMG2 for 10 equally-spaced incident energies is 120 seconds. The NESC executed the sample problems for COREL, RASE4, and DAMG2 in 2, 6, and 4 CPU seconds respectively.

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Package ID | Status date | Status |
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NESC0758/01 | 01-OCT-1979 | Tested at NEADB |

NESC0758/02 | 01-OCT-1979 | Tested at NEADB |

NESC0758/03 | 01-OCT-1979 | Tested at NEADB |

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NESC0758/01, included references:

- D.K. Brice:Ion Implantation Range and Energy Deposition Codes COREL, RASE4,

and DAMG2

SAND75-0622 (July 1977).

NESC0758/02, included references:

- D.K. Brice:Ion Implantation Range and Energy Deposition Codes COREL, RASE4,

and DAMG2

SAND75-0622 (July 1977).

NESC0758/03, included references:

- D.K. Brice:Ion Implantation Range and Energy Deposition Codes COREL, RASE4,

and DAMG2

SAND75-0622 (July 1977).

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Package ID | Computer language |
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NESC0758/01 | FORTRAN-IV |

NESC0758/02 | FORTRAN-IV |

NESC0758/03 | FORTRAN-IV |

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NESC0758/01

File name | File description | Records |
---|---|---|

NESC0758_01.001 | SOURCE (F4,EBCDIC) | 675 |

NESC0758_01.002 | SAMPLE INPUT DATA | 10 |

NESC0758_01.003 | SAMPLE OUTPUT | 218 |

NESC0758/02

File name | File description | Records |
---|---|---|

NESC0758_02.001 | SOURCE (F4,EBCDIC) | 686 |

NESC0758_02.002 | SAMPLE INPUT DATA | 8 |

NESC0758_02.003 | SAMPLE OUTPUT | 497 |

NESC0758_02.004 | COREL /RASE4 /DAMG2 - JCL | 34 |

NESC0758/03

File name | File description | Records |
---|---|---|

NESC0758_03.001 | SOURCE (F4,EBCDIC) | 1056 |

NESC0758_03.002 | SAMPLE INPUT DATA | 16 |

NESC0758_03.003 | SAMPLE OUTPUT | 581 |

Keywords: ion implantation, radiation effects, scattering, slowing-down.